Design simulation and finite element analysis of piezoresistive microcantilever for human stress measurement / Nina Korlina Madzhi ...[et al.]

Madzhi, Nina Korlina and Ahmad, Anuar and Lee, Yoot Khuan and Abd Rani, Rozina (2009) Design simulation and finite element analysis of piezoresistive microcantilever for human stress measurement / Nina Korlina Madzhi ...[et al.]. Journal of Electrical and Electronic Systems Research (JEESR), 2: 4. ISSN 1985-5389

Abstract

This work focuses on the design and finite element analysis of a polysilicon-based piezoresistive microcantilever beam for application in human stress measurement. In principle, adsorption of saliva amylase on a functionalized surface of the microfabricated cantilever induces surface stress and consequently the bending of the cantilever beam. In this paper, the microcantilever beam is constructed and bending analysis is performed so that tip deflection of the beam can be predicted. The device is modeled using CoventorWareTM. The structural variation in the piezoresistor design on the cantilever beam is investigated to increase the sensitivity of the microcantilever sensor. The stress distribution and the vertical displacement of the piezoresistive microcantilever designed are studied through simulation. The relative resistance changes in the piezoresistors as a function of the vertical displacements of the microcantilever beam is also investigated. It is found that the deflection displacement increases with length and thickness of piezoresistor. The relative resistance change in the piezoresistors is found to increase when the thickness decreases.

Metadata

Item Type: Article
Creators:
Creators
Email / ID Num.
Madzhi, Nina Korlina
nina654@salam.uitm.edu.my
Ahmad, Anuar
dranuar@unisel.edu.my
Lee, Yoot Khuan
UNSPECIFIED
Abd Rani, Rozina
UNSPECIFIED
Subjects: T Technology > TA Engineering. Civil engineering > Engineering mathematics. Engineering analysis > Finite element method
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Journal or Publication Title: Journal of Electrical and Electronic Systems Research (JEESR)
UiTM Journal Collections: UiTM Journal > Journal of Electrical and Electronic Systems Research (JEESR)
ISSN: 1985-5389
Volume: 2
Keywords: Deflection, Piezoresistive Microcantilever, Saliva Amylase, Surface Stress
Date: June 2009
URI: https://ir.uitm.edu.my/id/eprint/61859
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