Abstract
In this study, resistive humidity sensors were fabricated using ZnO-based nanocomposite films on top of ZnO-seed-layer-coated glass substrates. This study introduced different novel configurations of humidity sensors that were prepared using sol-gel immersion and sputtering method. Several approaches, such as doping and constructing composite films, were applied to improve the ZnO-based humidity sensors. The structural, optical, and electrical properties of the synthesized films were characterized via field-emission scanning electron microscopy, transmission electron microscopy, X-ray diffraction, atomic force microscopy, energy-dispersive X-ray spectroscopy, Raman spectroscopy, ultraviolet–visible–infrared spectrophotometry, and two-probe current-voltage measurement. The humidity sensing performances of the films were measured in a humidity chamber equipped with a measurement system. Results showed that the intrinsic ZnO nanorod arrays (NRAs) exhibited a humidity sensitivity of 1.53. The humidity sensing performance of the fabricated ZnO NRAs could be further enhanced to 3.7 by doping with 1 at.% of tin (Sn). A slight increment of humidity sensitivity of the Sn-doped ZnO (SZO) film was facilitated by the enlargement of surface area.
Metadata
Item Type: | Thesis (PhD) |
---|---|
Creators: | Creators Email / ID Num. Ismail@Rosdi, Ahmad Syakirin 2016439714 |
Contributors: | Contribution Name Email / ID Num. Thesis advisor Mamat, Mohamad Hafiz UNSPECIFIED |
Subjects: | T Technology > TA Engineering. Civil engineering > Materials of engineering and construction > Composite materials. T Technology > TA Engineering. Civil engineering > Graphene |
Divisions: | Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering |
Programme: | Doctor of Philosophy (Electrical Engineering) – EE950 |
Keywords: | Humidity sensors, voltage, nanocomposite |
Date: | 2019 |
URI: | https://ir.uitm.edu.my/id/eprint/83024 |
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