Electrical properties of amorphous carbon thin films deposited by bias assisted pyrolysis-CVD

This thesis investigates the electrical properties of amorphous carbon thin films by varying the different temperature and was deposited on the glass substrates by using bias-assisted pyrolysis-CVD. The amorphous carbon thin films were characterized by using Current-Voltage (I-V) measurement in dark and under illumination, UV-Vis/NIR Spectrophotometer and Atomic Force Microscopy (AFM). The electrical properties measurements in dark and under illumination show that, the resistivity decreases from 2.22x10⁸Ω.cm to 4.32x10⁷Ω.cm and conductivity increases from 4.51x10¯⁹S.cm¯¹ to 2.32x10¯⁸S.cm¯¹when the temperature increases from 250 to 550⁰C. While the optical properties measurements shows the high absorption coefficient at the highest temperature, 550⁰C. The surface morphology images also shows that the amorphous carbon thin films particles uniformly shaped from 3.63μm² to 0.75μm².