Preparation of zink oxide nanorods on thin film template using Sol-Gel method for humidity sensor application / Chempaka Mohd Din

This paper focuses on the preparation of Zinc Oxide (ZnO) nanorods on thin film template for humidity sensor that has been prepared by Sol-gel method. Spin coating process is used to deposit thin film of 5, 10, 15 and 20 layers which act as catalyst foliowed by immersion process for growth of nanostructured ZnO. The surface morphology is characterized by using Scanning Electron Microscopy (SEM) shows that the 10 layers of thin film give 78.5nm in diameter which is the minimum size ZnO nanorods. Current-voltage measurement indicates that 10 layers of Zno thin film gives high resistance value and the change of resistance over the change of percent relative humidity gives highest sensitivity of 85.013kQ/%RH to absorb humidity effectively than others because the thicker thin film is easy to peeled-off and affect the sensitivity of ZnO nanorods. It can be concluded that 10 layers of ZnO thin film have high potential as a sensing material for humidity sensor applications.