Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad

Muhamad, Suriati (2014) Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad. Degree thesis, Universiti Teknologi MARA (UiTM).

Abstract

This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,

Metadata

Item Type:	Thesis (Degree)
Creators:	Creators Email / ID Num. Muhamad, Suriati UNSPECIFIED
Contributors:	Contribution Name Email / ID Num. Thesis advisor Awang, Zaiki (Assoc. Prof. Dr.) UNSPECIFIED
Divisions:	Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Programme:	Bachelor in Electrical Engineering (Hons.)
Keywords:	Technique, Electrocode, Microscope
Date:	2014
URI:	https://ir.uitm.edu.my/id/eprint/86983