Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad

Muhamad, Suriati (2014) Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad. Degree thesis, Universiti Teknologi MARA (UiTM).

Abstract

This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,

Metadata

Item Type: Thesis (Degree)
Creators:
Creators
Email / ID Num.
Muhamad, Suriati
UNSPECIFIED
Contributors:
Contribution
Name
Email / ID Num.
Thesis advisor
Awang, Zaiki (Assoc. Prof. Dr.)
UNSPECIFIED
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Programme: Bachelor in Electrical Engineering (Hons.)
Keywords: Technique, Electrocode, Microscope
Date: 2014
URI: https://ir.uitm.edu.my/id/eprint/86983
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