Abstract
This paper presents comparison between measurement of dielectric constant of silicon wafer by using MNDT which is at high frequency and by using HIOKI 3532-50 LCR HiTESTER which at low frequency. Measurement of dielectric properties of silicon wafer at microwave frequencies is performed in free space using a pair of spotfocusing horn lens antennas, mode transitions, coaxial cable and vector network analyser (VNA). A contactless and non-destructive microwave method has been developed to characterize silicon semiconductor wafer from reflection and transmission measurement made in free space at normal incident. In this method, the free-space reflection and transmission coefficients, S11 and S21 are measured for silicon wafer sandwiched between two teflon plates which are quarter-wavelength at mid-band. The actual reflection and transmission coefficient, S11 and S21 of the silicon wafers are calculated from the measured S 11 and S21 of the teflon plate-silicon waferteflon plate assembly in which the complex permittivity and thickness of the teflon plates are known. Result for p-type and n-type doped silicon wafer are reported in frequency range of l 0GHz to 12GHz. As a comparison, a measurement at low frequency using DC method has been conducted. The frequency range is reported from 0.2 kHz to 50 kHz.
Metadata
Item Type: | Thesis (Degree) |
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Creators: | Creators Email / ID Num. Md Kamal, Nadia 2006687109 |
Contributors: | Contribution Name Email / ID Num. Thesis advisor Naim, Nani Fadzlina UNSPECIFIED |
Subjects: | T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics > Microwaves. Including microwave circuits |
Divisions: | Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering |
Programme: | Bachelor of Electrical Engineering (Hons) |
Related URLs: | |
Keywords: | Microwave frequencies, MNDT, dielectric properties |
Date: | 2010 |
URI: | https://ir.uitm.edu.my/id/eprint/81107 |
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