Herman, Sukreen Hana and Kimihiro, Sasaki and Tomonobu, Hata
(2004)
Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata.
In: STSS 2004: Sains Teknologi Jilid 1, 31 Mei – 1 Jun 2004, Hotel Vistana, Kuantan, Pahang.
Abstract
PZT films were prepared on Pt/Ti/SiO2/Si substrate by RF reactive sputtering apparatus using metal-oxide composite ZrTi+PbO2 powder and pellet targets. The main sputtering conditions are as follows: sputtering gas is argon and oxygen, gas pressure is 1810-2Torr, 02/Ar flow rate is 0% and
4.2%, substrate temperature is 200 (unintentionally heated), 450 and 550°C. PbOz target occupation is 300%. It is confirmed that PbOz pellet target has the potential to be the oxygen-source during the deposition with a high deposition rate. Perovskite PZT peak was observed in XRD measurement for film grown with PbO2 pellet target without introducing, my oxygen gas and with a small target occupation during deposition.
Metadata
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Creators: | Creators Email / ID Num. Herman, Sukreen Hana UNSPECIFIED Kimihiro, Sasaki UNSPECIFIED Tomonobu, Hata UNSPECIFIED |
| Subjects: | Q Science > QC Physics > Heat > Temperature T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electric apparatus and materials. Electric circuits. Electric networks T Technology > TP Chemical technology > Chemicals > Oxygen. Ozone |
| Divisions: | Universiti Teknologi MARA, Pahang > Jengka Campus |
| Journal or Publication Title: | Sains Teknologi Jilid 1 |
| Event Title: | STSS 2004: Sains Teknologi Jilid 1 |
| Event Dates: | 31 Mei – 1 Jun 2004 |
| Page Range: | pp. 436-440 |
| Keywords: | PZT, RF reactive sputtering, solid oxygen-source, deposition rate, pellet target |
| Date: | 2004 |
| URI: | https://ir.uitm.edu.my/id/eprint/52734 |
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