Effect of annealing temperature on undoped zinc oxide and aluminium doped ZnO by sol-gel spin coating / Anis Fazlinda Mohd Hassan.

ZnO and AZO thin films were deposited on glass substrate by using sol-gel spin coating technique with varying an annealing temperature. X-ray diffraction, atomic force microscopy(AFM) and field emission scanning electron microscopy analyses were used to investigate the effect of an annealing temperature on the crystallinity, surface morphology and surface roughness of the films. The results show that with an increase in an annealing temperature, the value of the full-width at half-maximum(FWHM) peak was highest for ZnO was at (002) peak. Studies of the optical properties of these films shown that at higher annealing temperature of ZnO and AZO thin films show an increased in optical transmittance.