Improvement of nanocomposited Zno/SnO₂ towards humidity sensor application / Mohamad Fadzil Tahar

This technical paper investigates the improvement of nanocomposite ZnO/SnO₂ that has been prepared on ZnO coated glass using thermal chemical vapor deposition (CVD). The sensor properties were characterized by using current-voltage (I-V) measurement (Keithley 2400). The results analyzed were for ZnO nanoparticle, SnO₂ nanorod and ZnO/SnO₂ nanoflower like structure. The structural properties have been characterized using field emission scanning electron microscopy (FESEM) (JEOL JSM 6701F). The thins films were tested using two point probe and the sensor were characterized using I-V measurement (Keithley 2400) in a clean humidity chamber (ESPEC SH-261) and the chamber has been set at same room temperature (25 °C) with percent relative humidity (RH %) varied in the range of 40% to 90% RH. ZnO/SnO₂ nanoflower like structure performed highest sensitivity with 15 ratio compared to the ZnO nanoparticle and SnO₂ nanorod. The response and recovery time for ZnO/SnO₂ nanoflower like structure were 156s and 54 s respectively.