Simulation of piezoelectric in MEMS gyroscope: article / Noor Azam Zakaria

Zakaria, Noor Azam (2013) Simulation of piezoelectric in MEMS gyroscope: article / Noor Azam Zakaria. pp. 1-6.

Abstract

In this paper, piezoelectric gyroscope based on Micro electro and mechanical system (MEMS) was presented using Ansys software. The design of piezoelectric gyroscope is based on parameter and structure which have selected from previous research and journal. The structure and the design of piezoelectric gyroscope have different output such as frequency, displacement or voltage output. It focused on quantitative indicator which is displacement ratio based on different length, width, depth and voltage apply on piezoelectric after the vibration and use Taguchi method to get the optimum performance from the best combination experiment. The result of this experiment shows the combination of 5x4x5mm with voltage applied 5v will give the optimum performance for the displacement ratio between y-axis, x-axis and z-axis which 0.3618 and 0.1180 for A and B respectively.

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Item Type: Article
Creators:
Creators
Email / ID Num.
Zakaria, Noor Azam
azam412@gmail.com
Subjects: T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Dielectric devices
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Page Range: pp. 1-6
Keywords: MEMS, gyroscope, piezoelectric
Date: July 2013
URI: https://ir.uitm.edu.my/id/eprint/115620
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