Effect of deposition time on the properties of ZnSnO₃ thin film for humidity sensor application: article / Noor Khadijah Md Shah

This paper presents the research on the effect of deposition time on the properties of ZnSnOr thin films for humidity sensor applications. This research involves four processes which are preperation of nanostructured ZnO thin films by using RF magnetron sputtering' preparation of ZnSnO3 sol-gel solution, metel contact deposition and characterizetion of humidity sensor. The electrical and structural properties of ZnSnO: thin lilms deposited at different deposition time using Sol-gel immersion-method have been studied. The thin lilms were cheracterized using current-voltage (l-V) measurement (Keithley 24fl)) for electrical and field emission scanning electron microscopy GESEM) (JEOL JSM 6701F) for structural properties respectively. The humidity measurement was conducted on Au metal contact deposited on ZnSn0: thin lilms connected to a circuit using copper wire. The sensor wes characterized using I-V measurement (keithley 24fi)) in a humidity chamber (ESPEC SH-26t) and the chamber had been set rt room tempereture of 25oC. Relative humidity (RH oz5) is varied in the range of ,() to 90 RH%. The sample with deposition time 2 hour shows good sensitivity material as humidity sensor. The FESEM investigation shows thet cubic structure of the thin lilms' size increase es the deposition time inereases.