Abstract
This study presents the effect of drying temperature and time on the properties of MgO thin films. Sol-gel spin coating was used as the preparing method of MgO thin films. The electrical properties were determined by I-V two point probes measurement while the structural properties were examined by field emission scanning electron microscope (FESEM) and atomic force microscopy (AFM). The impedance spectroscopy analyzer was used to determine the dielectric properties. It was found that increasing the drying temperatures and times resulted in the formation of bigger grain size and increasing of thin film resistivity. The best prepared thin film is the thin film that dried at 200 °C for 10 minute due to its uniformity, less porosity, high permittivity of 7.65 and also high in resistivity which is around 12.74 x 104 cm.
Metadata
Item Type: | Article |
---|---|
Creators: | Creators Email / ID Num. Yusof, Khairul Aimi UNSPECIFIED |
Subjects: | T Technology > TK Electrical engineering. Electronics. Nuclear engineering T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electric apparatus and materials. Electric circuits. Electric networks |
Divisions: | Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering |
Page Range: | pp. 1-5 |
Keywords: | Drying temperature; drying time; MgO; Sol-gel spin coating. |
Date: | 2015 |
URI: | https://ir.uitm.edu.my/id/eprint/115134 |