Effect of substrate temperature on the electrical properties of nanostructured zinc oxide thin film for ammonia sensor application: article / Muhammad Khairi Abdul Satar

This project focuses on the effect of substrate temperature on the electrical properties of nanostructured zinc oxide thin film for the ammonia sensor application. Nanostructured zinc oxide thin film has been deposited on the thermally oxidized SiO2 using radio frequency (RF) magnetron sputtering at various temperatures range from room temperature to 500oC. The thickness of the thin film was measured using surface profiler. The surface morphology and grain size were measured using field emission scanning electron microscopy (FESEM). The grain size were increased with the increased of substrate temperature. The effect of substrate temperature on the electrical properties and sensitivity has been investigated. The highest percentage of sensitivity is at room temperature that is 94.5%.