Abstract
Zinc oxide (ZnO) thin films were deposited using thermal chemical vapor deposition (TCVD) method with a two furnaces system. To enhance the growth of the nanostructure, the sol-gel spin coated ZnO templates were used. To study the effect of oxygen gas flow rate on the properties of the thin films, the gas flow rate were varied from 5 to 25 standard cubic centimeter per minute (sccm). The samples were characterized using field emission scanning electron microscopy (FESEM), photoluminescence (PL) spectra, current-voltage (I-V) measurement, X-Ray Diffraction (XRD). The FE-SEM images showed by increasing the gas flow rate of oxygen the feet of the nano-tetrapod became longer and thinner. Additionally, I-V curve shows that resistance of the thin films increase as the deposition oxygen gas flow rate increases.
Metadata
Item Type: | Thesis (Degree) |
---|---|
Creators: | Creators Email / ID Num. Muzahid Ali, Mohamad Faid UNSPECIFIED |
Contributors: | Contribution Name Email / ID Num. Thesis advisor Shariffudin, Shafinaz Sobihana UNSPECIFIED |
Subjects: | T Technology > TK Electrical engineering. Electronics. Nuclear engineering |
Divisions: | Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering |
Programme: | Bachelor of Engineering (Hons.) Electronics |
Keywords: | ZnO nanosturctures; thermal chemical vapor deposition; ZnO template; gas flow rate. |
Date: | 2012 |
URI: | https://ir.uitm.edu.my/id/eprint/114133 |
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