Zinc oxide thin films properties dependence on the gas flow rate of thermal chemical vapor deposition / Mohamad Faid Muzahid Ali

Muzahid Ali, Mohamad Faid (2012) Zinc oxide thin films properties dependence on the gas flow rate of thermal chemical vapor deposition / Mohamad Faid Muzahid Ali. Degree thesis, Universiti Teknologi MARA (UiTM).

Abstract

Zinc oxide (ZnO) thin films were deposited using thermal chemical vapor deposition (TCVD) method with a two furnaces system. To enhance the growth of the nanostructure, the sol-gel spin coated ZnO templates were used. To study the effect of oxygen gas flow rate on the properties of the thin films, the gas flow rate were varied from 5 to 25 standard cubic centimeter per minute (sccm). The samples were characterized using field emission scanning electron microscopy (FESEM), photoluminescence (PL) spectra, current-voltage (I-V) measurement, X-Ray Diffraction (XRD). The FE-SEM images showed by increasing the gas flow rate of oxygen the feet of the nano-tetrapod became longer and thinner. Additionally, I-V curve shows that resistance of the thin films increase as the deposition oxygen gas flow rate increases.

Metadata

Item Type: Thesis (Degree)
Creators:
Creators
Email / ID Num.
Muzahid Ali, Mohamad Faid
UNSPECIFIED
Contributors:
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Name
Email / ID Num.
Thesis advisor
Shariffudin, Shafinaz Sobihana
UNSPECIFIED
Subjects: T Technology > TK Electrical engineering. Electronics. Nuclear engineering
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Programme: Bachelor of Engineering (Hons.) Electronics
Keywords: ZnO nanosturctures; thermal chemical vapor deposition; ZnO template; gas flow rate.
Date: 2012
URI: https://ir.uitm.edu.my/id/eprint/114133
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