Fabrication of UV photoconductive sensor using aluminium doped ZnO nanorod arrays anneal in different environment: article / Mohd Izzuddin Che Khalin

Aluminium doped Zinc Oxide (ZnO) nanorod arrays anneal in different environment and different oxygen flow rate were fabricated of Al doped ZnO nanorod arrays prepared using sonicated sol-gel immersion. The FESEM are used to measure the substrate of the optical properties which surface morphology and thickness which has been seen that the thickness nearly to 600 nm and the diameter on the top surface of the nanorod is around 40 to 60 nm. The optical transmittance and absorbance was measure using UV-vis-NIR. Nanohole occur during the air annealed much more than oxygen annealed and vacuum annealed. The characteristic of the Al doped ZnO nanorod arrays seem give good performance according to the sensitivity under UV photoconductive sensor. These experiment are study that the oxygen occur through the increasing the flow rate compare to the other environment such as air and vacuum which annealed in oxygen give more sensitivity of the fabricated substrate due to expose of light from the UV photoconductive sensor.