Yusuf, R. and Taking, S. and Halim, N.H.A. and Aris, H. and Hussein, I.
(2006)
Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.].
In: Volume No. 1: Science and Technology, 30 – 31 May 2006, Swiss Garden Resort & Spa Kuantan, Pahang.
Abstract
Advanced analytical tools that have been primarily used for research and development application in the past are now being used extensively to understand semiconductor failure analysis and reliability problems. In this paper, we will discuss an application and technique in the use of Atomic Force Microscopy (AFM), Mini Secondary Ion Mass Spectroscopy (MiniSIMS), and Scanning Electron Microscopy (SEM) for teaching and learning purposes. These tools have been extensively used in identifying semiconductor characterization which contributes to enhancing the fabrication processes in Microelectronic labs specifically.
Metadata
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Creators: | Creators Email / ID Num. Yusuf, R. rihana@kukum.edu.my Taking, S. UNSPECIFIED Halim, N.H.A. UNSPECIFIED Aris, H. UNSPECIFIED Hussein, I. UNSPECIFIED |
| Subjects: | T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics |
| Divisions: | Universiti Teknologi MARA, Pahang > Jengka Campus |
| Journal or Publication Title: | Proceedings Of The National Seminar On Science, Technology And Social Sciences |
| Event Title: | Volume No. 1: Science and Technology |
| Event Dates: | 30 – 31 May 2006 |
| Page Range: | pp. 699-704 |
| Keywords: | Failure analysis, characterization, AFM, SEM, and MiniSIMS |
| Date: | 2006 |
| URI: | https://ir.uitm.edu.my/id/eprint/81936 |
- Edit Item
![[thumbnail of 81936.PDF]](https://ir.uitm.edu.my/style/images/fileicons/text.png)
