Surface morphological, topological and crystallinity characteristics of sputtered barium strontium titanate thin films on sapphire substrates / F.W. Jamaluddin … [et al.]

Jamaluddin, F.W. and Abdul Khalid, M. F. and Mahmood, M.K.A. and Mamat, M. H. and Zoolfakar, A.S. (2019) Surface morphological, topological and crystallinity characteristics of sputtered barium strontium titanate thin films on sapphire substrates / F.W. Jamaluddin … [et al.]. Journal of Electrical and Electronic Systems Research (JEESR), 15. pp. 60-65. ISSN 1985-5389 (Unpublished)

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Abstract

This paper presents the material characterization of barium strontium titanate (Ba0.5Sr0.5TiO3) thin films grown on sapphire substrates. The films were deposited by radio frequency (RF) magnetron sputtering system for 2, 3 and 4 hours on sapphire substrates, achieving film thicknesses of approximately 124 nm, 350 nm and 586 nm respectively. These BST thin films were postannealed for 2 hours at 900 oC and then characterized using several analytical techniques including x-ray diffraction (XRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM) and energy dispersive x-ray (EDX). AFM analysis shows that longer deposition time produces rougher surface due to larger grain size formation. The XRD patterns observed have intense (110) peaks, indicating the preferred orientation of the BST thin films. From the FESEM results, it is observed that the 3-hour deposited sample is dense and uniform compared to the 2-hour deposited sample. However, the 4-hour deposited sample shows a non-uniform film. EDX analysis shows that the composition element of 4-hour deposited sample is the closest to the ideal atomic concentration (at. %) of the BST thin film.

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Item Type: Article
Creators:
Creators
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Jamaluddin, F.W.
UNSPECIFIED
Abdul Khalid, M. F.
UNSPECIFIED
Mahmood, M.K.A.
UNSPECIFIED
Mamat, M. H.
UNSPECIFIED
Zoolfakar, A.S.
UNSPECIFIED
Subjects: Q Science > QD Chemistry > Organic chemistry
Q Science > QD Chemistry > Physical and theoretical chemistry > Chemical elements
Q Science > QD Chemistry > Analytical chemistry
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Journal or Publication Title: Journal of Electrical and Electronic Systems Research (JEESR)
UiTM Journal Collections: UiTM Journal > Journal of Electrical and Electronic Systems Research (JEESR)
ISSN: 1985-5389
Volume: 15
Page Range: pp. 60-65
Official URL: https://jeesr.uitm.edu.my
Item ID: 48860
Uncontrolled Keywords: RF sputtering, annealing, BST thin film
URI: https://ir.uitm.edu.my/id/eprint/48860

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48860

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