Influence of Bi Layer Structure and Sub Layer Distance on the Hardness of Multilayer Thin Film TiAlN and CrN / Siti Fatimah Hassan...[et al.]

Hassan, Siti Fatimah and Wan Zamri, Wan Fathul Hakim and Mohamed, Intan Fadhlina and Wan Ghopa, Wan Aizon and Md Din, Mohamad Faiz (2017) Influence of Bi Layer Structure and Sub Layer Distance on the Hardness of Multilayer Thin Film TiAlN and CrN / Siti Fatimah Hassan...[et al.]. Journal of Mechanical Engineering (JMechE), SI 3 (1). pp. 199-210. ISSN Special Issue Manufacturing Sustainability towards a Greener Future Vol 1

Abstract

Mechanical properties are important in identifying the suitability of a material for a particular usage. One of the important properties is the hardness of the material, which can be defined as the resistance to the material to abrasion, deformation, scratching or to indentation by another hard body. Among others, this property is important for wear resistant applications. In order to obtain the mechanical characterization of thin films, apart from physical nanoindentation testing, researchers have also been using the finite-element modelling (FEM) method to simulate the nanoindentation test. In this study, a nanoindentation model of thin film CrN and TiAlN were developed and simulated to investigate the influence on the number of layers and thin film structure on the overall hardness of multilayer thin film CrN and TiAlN. A total of 10 sets of simulation was conducted with varying structural arrangement (i.e. CrN/TiAlN and TiAlN/CrN), bi-layer thickness (i.e. from 0.2 μm to 2 μm) and number of layers (i.e. 1, 2, 4, 8 and 10 layers). Based on the study, it was found that the optimum distance of sub base for multilayer TiAlN/CrN was 0.8 μm, while the optimum distance of sub-layer for CrN/TiAlN was 0 μm. It can be concluded that the type of material and the distance of sub base thin film layer to the maximum indenter depth will have significant influence on the overall hardness of the thin film system.

Metadata

Item Type: Article
Creators:
CreatorsEmail / ID. Num
Hassan, Siti FatimahUNSPECIFIED
Wan Zamri, Wan Fathul HakimUNSPECIFIED
Mohamed, Intan FadhlinaUNSPECIFIED
Wan Ghopa, Wan AizonUNSPECIFIED
Md Din, Mohamad FaizUNSPECIFIED
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Mechanical Engineering
Journal or Publication Title: Journal of Mechanical Engineering (JMechE)
Journal: UiTM Journal > Journal of Mechanical Engineering (JMechE)
ISSN: Special Issue Manufacturing Sustainability towards a Greener Future Vol 1
Volume: SI 3
Number: 1
Page Range: pp. 199-210
Item ID: 38550
Uncontrolled Keywords: TiAlN/CrN, Nanoindentation, Finite Element Modelling
URI: http://ir.uitm.edu.my/id/eprint/38550

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