Artificial intelligence technique in solving nano-process parameter optimization problem / Norlina Mohd Sabri...[et al.]

Mohd Sabri, Norlina and Puteh, Mazidah and Md Sin, Nor Diyana (2017) Artificial intelligence technique in solving nano-process parameter optimization problem / Norlina Mohd Sabri...[et al.]. Journal of Mechanical Engineering (JMechE), SI 1 (1). pp. 1-17. ISSN 1823-5514 ; 2550-164X


Nanotechnology has brought huge impacts to our modern life in many ways. The technology has been adapted in various domains such as biotechnology, chemicals, computing, electronics, metals, materials, renewable energy and also telecommunications. This research is focusing on the RF magnetron sputtering process, one of the nanotechnology processes which are widely used in the thin film technology. The conventional method that is currently practiced in the optimization of the RF magnetron sputtering process parameters is trial and error method. However, the practice of repetitively conducting experiments has consumed a lot of time and cost in the thin film construction. This research is proposing artificial intelligence (AI) technique as the alternative technique to overcome the sputtering process parameter optimization problem. Three artificial intelligence techniques have been selected to solve this parameter optimization problem. The techniques are Genetic Algorithm (GA), Particle Swarm Optimization (PSO) and Gravitational Search Algorithm (GSA). In the process parameter optimization, automated process has never been implemented to optimize the six deposition parameters of the RF magnetron sputtering. Based on the results, GA has shown the best performance compared to PSO and GSA in terms of the fitness value and processing time. Laboratory results have shown that GA has produced the highest values of electrical and optical properties of thin film. It is expected that AI techniques could complement the conventional method of trial and error in obtaining the optimized process parameter combination.


Item Type: Article
Email / ID Num.
Mohd Sabri, Norlina
Puteh, Mazidah
Md Sin, Nor Diyana
Subjects: T Technology > TJ Mechanical engineering and machinery
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Mechanical Engineering
Journal or Publication Title: Journal of Mechanical Engineering (JMechE)
UiTM Journal Collections: UiTM Journal > Journal of Mechanical Engineering (JMechE)
ISSN: 1823-5514 ; 2550-164X
Volume: SI 1
Number: 1
Page Range: pp. 1-17
Keywords: Artificial Intelligence, RF Magnetron Sputtering, Genetic Algorithm, Particle Swarm Optimization, Gravitational Search Algorithm
Date: 2017
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