Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit

Ahmad, Halim and Abdullah, Mat Johar and Lepit, Ajis (2017) Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit. Borneo Akademika, 2 (1). pp. 18-27. ISSN 2462-1641

Abstract

C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configuration. The crystalline and optical quality of the film had improved after the heat treatment. It was found that the Schottky barrier heights as prepared and heat treated using Ag/ZnO interface was around 0.74 and 0.76 eV respectively. The leakage current was reduced from 18.6 mA to 0.6 μA at 5V after post deposition annealing when compared with that of as deposited ZnO.The Ag/ZnO/Ag configuration showed a faster decay time of 212 s.

Metadata

Item Type: Article
Creators:
Creators
Email / ID Num.
Ahmad, Halim
halim667@uitm.edu.my
Abdullah, Mat Johar
matjohar@usm.my
Lepit, Ajis
ajis@uitm.edu.my
Subjects: T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Metal oxide semiconductors
T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics > Detectors. Sensors. Sensor networks
T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics > Photoelectronic devices (General)
Divisions: Universiti Teknologi MARA, Sabah > Kota Kinabalu Campus
Journal or Publication Title: Borneo Akademika
UiTM Journal Collections: Others > Borneo Akademika
ISSN: 2462-1641
Volume: 2
Number: 1
Page Range: pp. 18-27
Keywords: Zinc Oxide; UV; Photodetector
Date: January 2017
URI: https://ir.uitm.edu.my/id/eprint/34421
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