A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao

Terry, Adam and Ramulu, Mamidala and Nageswara Rao, Posinasetti (2009) A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao. Journal of Mechanical Engineering (JMechE), 6 (1). pp. 19-41. ISSN 1823-5514 ; 2550-164X

Abstract

The production of Integrated Circuits (IC) is a detailed and exacting process requiring tight specifications and precise equipment. The high cost and unique traits of this equipment requires high utilization and maximum throughput to achieve real profits. The design of fabrication facility (FAB) processes requires a thorough understanding of the adverse effects that random machine availability has on system performance. These effects (increased cycle time, decreased and variable throughput, etc) can be offset by tool group flexibility. Tool group flexibility can be described by two measures: machine flexibility (the number of tasks a machine can perform) and task flexibility (the number of machines qualified to perform a specific task). These two measures are related by the ratio of the number of machines in the tool group to the number of tasks that the group must perform. This paper utilizes a combined linear programming and simulation approach in an attempt to model the manufacturing system to gain insight into the production dynamics. The model is based on current production methodology and the use of modular equipment (steppers). The results include some insight into the added cost of flexibility and the associated production ramifications.

Metadata

Item Type: Article
Creators:
Creators
Email / ID Num.
Terry, Adam
UNSPECIFIED
Ramulu, Mamidala
UNSPECIFIED
Nageswara Rao, Posinasetti
UNSPECIFIED
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Mechanical Engineering
Journal or Publication Title: Journal of Mechanical Engineering (JMechE)
UiTM Journal Collections: UiTM Journal > Journal of Mechanical Engineering (JMechE)
ISSN: 1823-5514 ; 2550-164X
Volume: 6
Number: 1
Page Range: pp. 19-41
Keywords: Linear Programming (LP), Simulation, Integrated Circuit, Fabrication, Re-entrant systems, modeling, semiconductor, machine flexibility
Date: 2009
URI: https://ir.uitm.edu.my/id/eprint/17619
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17619

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