Simulation of piezoelectric in MEMS gyroscope / Noor Azam Zakaria

In this paper, piezoelectric gyroscope based on Micro electro and mechanical system (MEMS) was presented using Ansys software. The design of piezoelectric gyroscope is based on parameter and structure which have selected from previous research and journal. The structure and the design of piezoelectric gyroscope have different output such as frequency, charge or voltage output. It focused on quantitative indicator based on different length, width, depth and voltage apply on piezoelectric plate from the vibration and use Taguchi method to get the optimum performance from the best combination experiment. The result of this experiment shows the combination of 5x4x5mm with voltage applied 5v will give the optimum performance for the displacement ratio between y-axis, x-axis and z-axis which 0.3618 and 0.1180 for A and B respectively.