Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi

Madzhi, Nina Korlina (2012) Development and fabrication of piezoresistive microcantilever-based glucose biosensor / Nina Korlina Madzhi. In: The Doctoral Research Abstracts. IPSis Biannual Publication, 1 (1). Institute of Graduate Studies, UiTM, Shah Alam.

Abstract

This thesis is focused on the Development and Fabrication of the Piezoresistive Microcantilever-based Glucose Biosensor. The objective of this work is to design via simulation a piezoresistive microcantilever sensor suitable for glucose sensing. Then, the piezoresistive microcantilever is fabricated with CMOS micromachining technique. The fabricated piezoresistive microcantilever performed the fabrication process characterization to prove the viability of the design. Finally, the objective in this work is to identify suitable Glucose immobilization technique onto microcantilever surface. The methodology of this work starts with the designing of piezoresistive microcantilever. The microcantilever beam length is selected at 195μm and width, 70μm. On this microcantilever beam there are four different piezoresistor with the length of 80μm, 110μm, 140μm and 170μm. The sacrificial layer of BPSG material in the piezoresistive microcantilever have two different thickness of 0.9μm and 1.8μm.

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Metadata

Item Type: Book Section
Creators:
CreatorsID Num.
Madzhi, Nina KorlinaUNSPECIFIED
Subjects: L Education > LB Theory and practice of education > Higher Education > Dissertations, Academic. Preparation of theses > Malaysia
Divisions: Institut Pengajian Siswazah (IPSis) : Institute of Graduate Studies (IGS)
Series Name: IPSis Biannual Publication
Volume: 1
Number: 1
Item ID: 19111
Uncontrolled Keywords: Abstract; Abstract of thesis; Newsletter; Research information; Doctoral graduates; IPSis; IGS; UiTM; Glucose biosensor
URI: http://ir.uitm.edu.my/id/eprint/19111

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