Structural and Ph sensing properties of spin coated Tio₂ thin films with varied sol-gel concentration and with different composite bilayer configuration / Rohanieza Abdul Rahman …[et al.]

Abdul Rahman, Rohanieza and Yusof, Khairul Aimi and Zulkefle, Muhammad Al Hadi and Abdullah, Wan Fazlida Hanim and Kamarudin, Yusuf (2019) Structural and Ph sensing properties of spin coated Tio₂ thin films with varied sol-gel concentration and with different composite bilayer configuration / Rohanieza Abdul Rahman …[et al.]. Journal of Electrical and Electronic Systems Research (JEESR), 15. pp. 52-59. ISSN 1985-5389

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Abstract

Sol-gel spin coated titanium dioxide (TiO2) was applied as the sensing membrane for extended gate field effect transistor (EGFET) pH sensor. The molarity of the TiO2 sol-gel was manipulated to study its influence on the film pH sensing capability. In this study, the sol-gel solution concentration was varied from 0.2 M to 1.0 M. It was observed that an increase in molarity used would results in the decrease of pH sensitivity of the TiO2 thin film, in which, the highest pH sensitivity (42.60 mV/pH) was obtained from the film deposited using the lowest concentration. As sol-gel concentration becomes higher, the films becomes thicker, deteriorating its pH sensing performance. FESEM images showed that the variation of the sol-gel concentration influenced the surface morphology. XRD results obtained confirmed the anatase phase existence in all TiO2 samples, excluding that of 0.2 M sample that was amorphous with no peaks. Besides that, composite bilayer sensing structure obtained by incorporating ZnO with TiO2 thin film can produce sensing membrane with higher pH sensitivity than a pure TiO2 sensing membrane. The sensitivity value for TiO2/ZnO and ZnO/TiO2 composite bilayer samples are 57.1 mV/pH and 46.9 mV/pH respectively.

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Item Type: Article
Creators:
Creators
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Abdul Rahman, Rohanieza
UNSPECIFIED
Yusof, Khairul Aimi
UNSPECIFIED
Zulkefle, Muhammad Al Hadi
UNSPECIFIED
Abdullah, Wan Fazlida Hanim
UNSPECIFIED
Kamarudin, Yusuf
UNSPECIFIED
Subjects: Q Science > QC Physics > Electricity and magnetism
T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics > Apparatus and materials
T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics > Detectors. Sensors. Sensor networks
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Journal or Publication Title: Journal of Electrical and Electronic Systems Research (JEESR)
UiTM Journal Collections: UiTM Journal > Journal of Electrical and Electronic Systems Research (JEESR)
ISSN: 1985-5389
Volume: 15
Page Range: pp. 52-59
Official URL: https://jeesr.uitm.edu.my
Item ID: 48857
Uncontrolled Keywords: composite bilayer, EGFET, pH sensor
URI: https://ir.uitm.edu.my/id/eprint/48857

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48857

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