Effect of deposition time on structural and electrical properties of AZO thin films deposited by spray pyrolysis / Sofea Nabila Hazmin, Mohamad Hafiz Mamat and Nur Amalina Muhamad

Hazmin, Sofea Nabila and Mamat, Mohamad Hafiz and Muhamad, Nur Amalina (2021) Effect of deposition time on structural and electrical properties of AZO thin films deposited by spray pyrolysis / Sofea Nabila Hazmin, Mohamad Hafiz Mamat and Nur Amalina Muhamad. Journal of Electrical and Electronic Systems Research (JEESR), 18. pp. 53-57. ISSN 1985-5389

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Abstract

Aluminium zinc oxide (AZO) thin films were deposited by spray pyrolysis method using different deposition time 10 s, 20 s, 30 s, 40 s, 50 s and 60 s. The structural and electrical properties of the AZO thin films were investigated by X-ray diffraction (XRD) and two-point probe system. XRD results reveal that all AZO thin films were polycrystalline with hexagonal wurtzite structure with a preferential oriental in the (101) plane. The crystalline size was calculated from Scherrer’s formula were in the range from 31 nm to 44 nm. According to the current-voltage (IV) measurement spectra, the AZO thin films deposited on Teflon substrates with different deposition time had a resistivity of 1.08 x 102 Ωcm to 9.78 x 101 Ωcm along with conductivity in the range of 1.02 x 10-2 Scm-1 to 9.26 x 10-3 Scm-1 .

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Item Type: Article
Creators:
Creators
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Hazmin, Sofea Nabila
UNSPECIFIED
Mamat, Mohamad Hafiz
UNSPECIFIED
Muhamad, Nur Amalina
UNSPECIFIED
Subjects: T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Applications of electric power
T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics
T Technology > TK Electrical engineering. Electronics. Nuclear engineering > Electronics > Apparatus and materials
Divisions: Universiti Teknologi MARA, Shah Alam > Faculty of Electrical Engineering
Journal or Publication Title: Journal of Electrical and Electronic Systems Research (JEESR)
UiTM Journal Collections: UiTM Journal > Journal of Electrical and Electronic Systems Research (JEESR)
ISSN: 1985-5389
Volume: 18
Page Range: pp. 53-57
Official URL: https://jeesr.uitm.edu.my
Item ID: 47331
Uncontrolled Keywords: deposition time, electrical properties, structural properties
URI: https://ir.uitm.edu.my/id/eprint/47331

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47331

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