A method for determining tool group flexibility with uncertain machine availability - applications in a semiconductor manufacturing process / Adam Terry, Mamidala Ramulu and Posinasetti Nageswara Rao



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Divisions: Faculty of Mechanical Engineering
Journal or Publication Title: Journal of Mechanical Engineering
ISSN: 1823-5514
Volume: 6
Number: 1
Item ID: 17619
Uncontrolled Keywords: Linear Programming (LP), Simulation, Integrated Circuit, Fabrication, Re-entrant systems, modeling, semiconductor, machine flexibility
Last Modified: 17 Aug 2017 04:11

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Filename: AJ_ADAM TERRY JME 09.pdf

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